




Metalens on 8'' Wafers
Polarizer Comparison Tool
Metalens 8" Production Wafer
Polarizer Comparison Tool
Absorptive Aperture
Polarizer Comparison Tool
2mm Metalens
Polarizer Comparison Tool
5mm Metalens
Polarizer Comparison Tool
X

Moxtek Advantages
- Uniform lens replication over Ø200mm wafer
- Production and prototype compatible processes
- Niobium oxide (Nb2O5) has proven beneficial in ease of deposition, uniform etching, and lower cost
- Ability to replicate customer designs
- Experience with thin-film deposition, etching, and NIL
- In-house metalens modeling
- Flexibility in lens parameters
- Protective overcoat enhances durability and performance
Design Parameters
- Minimum CD: 70nm
- Minimum Space Gap: 70nm
- Thickness: ≤1,000nm
- Aspect Ratio: 12:1
- Meta Materials (preferred): Nb2O5, Al
- Meta Materials (other): Si, SiO2, Si3N4
- Substrate Diameter: Ø200mm diameter
- Substrate Thicknesses: 0.7mm to 1.6mm thick
- Substrate Types: Display glass, Fused Silica, Silicon, Sapphire