Metalenses have significant differences from conventional lenses that require extra consideration for lens metrology. Metalenses are generally fabricated on wafer, which presents an advantage in terms of metrology at large scales. A metalens metrology tool can be designed to work with arrays of lenses on wafers, rather than just individual lenses. A single wafer designed for mass-production of metalenses can contain thousands of lenses and an appropriate metrology tool can measure them in quick succession. Properly set up, the metrology processes for metalenses can have greatly enhanced throughput by reduction of loading and alignment. The metalens fabrication process can be used to fabricate elements with a wide variety of optical functions. In addition to lenses, one optical function is that of a linear diffraction grating, commonly referred to as a “beam bender”. Another function is that of a “beam generator” or “structured light generator”. However, for this article only the characterization of metalenses will be discussed. Moxtek’s